JPH0347803Y2 - - Google Patents

Info

Publication number
JPH0347803Y2
JPH0347803Y2 JP1984168139U JP16813984U JPH0347803Y2 JP H0347803 Y2 JPH0347803 Y2 JP H0347803Y2 JP 1984168139 U JP1984168139 U JP 1984168139U JP 16813984 U JP16813984 U JP 16813984U JP H0347803 Y2 JPH0347803 Y2 JP H0347803Y2
Authority
JP
Japan
Prior art keywords
fluid
lattice
moving
movable table
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984168139U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6181829U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984168139U priority Critical patent/JPH0347803Y2/ja
Publication of JPS6181829U publication Critical patent/JPS6181829U/ja
Application granted granted Critical
Publication of JPH0347803Y2 publication Critical patent/JPH0347803Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1984168139U 1984-11-06 1984-11-06 Expired JPH0347803Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984168139U JPH0347803Y2 (en]) 1984-11-06 1984-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984168139U JPH0347803Y2 (en]) 1984-11-06 1984-11-06

Publications (2)

Publication Number Publication Date
JPS6181829U JPS6181829U (en]) 1986-05-30
JPH0347803Y2 true JPH0347803Y2 (en]) 1991-10-11

Family

ID=30725919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984168139U Expired JPH0347803Y2 (en]) 1984-11-06 1984-11-06

Country Status (1)

Country Link
JP (1) JPH0347803Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101857272B1 (ko) * 2017-04-26 2018-05-14 덕흥 주식회사 스크류 가공장치의 클램핑 구조

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113318A (ja) * 1982-12-20 1984-06-30 Toshiba Corp 移動テ−ブル装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101857272B1 (ko) * 2017-04-26 2018-05-14 덕흥 주식회사 스크류 가공장치의 클램핑 구조

Also Published As

Publication number Publication date
JPS6181829U (en]) 1986-05-30

Similar Documents

Publication Publication Date Title
JP2881363B2 (ja) 平行移動装置およびレンズ移動装置
US5228358A (en) Motion guiding device
US4893914A (en) Test station
US4392642A (en) Workpiece positioning table with air bearing pads
JP3608792B2 (ja) 外部から加圧されるベアリング・アセンブリの製造方法
US4571799A (en) Method for producing air bearing pads for positioning table
WO1999013289A1 (en) Coordinate measuring machine of a gantry-style
JPH05149332A (ja) 直動転がり案内ユニツト及び該ユニツトに用いる防振装置
US4479681A (en) Track guide bearing assembly
EP0443831B1 (en) Motion guiding device
US3231319A (en) Precision slide
JP3481540B2 (ja) ステージ装置
US4643590A (en) Guide system
JP2012519078A (ja) 短ストロークステージ用たわみガイド軸受
EP1486756B1 (en) Measuring instrument
JPH0347803Y2 (en])
US4946293A (en) Gas bearing having an auxiliary reservoir
JPH0123262B2 (en])
JP2000028344A (ja) 位置決めテーブル
JP3098421B2 (ja) 静圧空気軸受け式案内装置
JPS61112216A (ja) 非接触駆動形平面移動台
JPH0329074Y2 (en])
JPH0516167B2 (en])
JPH05296245A (ja) 流体リニアガイド装置
JPH0915359A (ja) ステージ